The CYSI Three-Temperature-Zone PECVD Tube Furnace combines three independently controlled heating zones with a 13.56 MHz RF plasma source to enable plasma-enhanced CVD growth of graphene, carbon nanotubes, MoS₂, and other 2D materials at significantly lower temperatures than thermal CVD alone. The plasma activation enhances precursor dissociation and lowers the growth temperature threshold, enabling growth on temperature-sensitive substrates and exploration of plasma-specific growth mechanisms not accessible with thermal CVD systems.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-PECVD-3Zone |
| Heating Zones | 3 — independent temperature control |
| Maximum Temperature | 1200 °C per zone |
| RF Frequency | 13.56 MHz |
| RF Power | Up to 300 W |
| Tube Material | Quartz — inner diameter 60 mm |
| Gas Lines | 3-channel MFC (CH₄, H₂, Ar or precursor carrier) |
| Vacuum Option | Rotary pump — LPCVD mode down to 10 Pa |
| Plasma Zone | Zone 2 (growth zone) — RF plasma coupling |
| Temperature Controller | Triple PID — 30-segment each zone |
| Growth Materials | Graphene, CNTs, MoS₂, WS₂, h-BN, DLC |
| Cooling | Forced air cooling — fast ramp down |
| Supply Voltage | AC 220 V / 50 Hz |
| Total Power | ≈ 5 kW |
| Applications | Plasma-enhanced graphene, CNT, 2D material low-temperature growth |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |
