This CYSI high-temperature RF PECVD system is configured specifically for passivation and anti-reflection coating deposition in crystalline silicon solar cell manufacturing. Operating at 13.56 MHz with substrate temperatures up to 450 °C, it produces dense, stoichiometric SiNₓ:H layers with low hydrogen content and excellent surface passivation — critical for high-efficiency PERC, PERT, and HJT solar cell fabrication.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-PECVD-HT-Solar |
| RF Frequency | 13.56 MHz |
| RF Power | Up to 2000 W |
| Reactor Configuration | Inline parallel plate — batch processing |
| Substrate Heater | Up to 450 °C |
| Gas Lines | 4 channels with MFC (SiH₄, NH₃, N₂, H₂, Ar) |
| Base Pressure | < 5 × 10⁻⁴ Pa |
| Working Pressure | 20–300 Pa |
| Vacuum System | Roots pump + rotary vane pump |
| Film Types | SiNₓ:H, SiO₂, a-Si:H, µc-Si:H passivation layers |
| Deposition Rate | 5–20 nm/min (SiNₓ typical) |
| Refractive Index Control | 1.8–2.2 (adjustable by gas ratio) |
| Wafer Size | Up to 210 × 210 mm (M6 silicon wafer) |
| Supply Voltage | AC 380 V / 50 Hz, 3-phase |
| Applications | PERC, PERT, HJT, TOPCon solar cell passivation & ARC |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |
