The CYSI Universal High-Vacuum PVD System is a modular research platform configurable for plasma-assisted CVD, thermal spraying, magnetron sputtering, and electron-beam evaporation within a single large-volume stainless steel chamber. Multiple source ports, substrate manipulation, and an advanced vacuum system make it the ultimate all-in-one thin film deposition workstation for university and national laboratory thin film research programmes.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-UNI-HV-PVD |
| Chamber Diameter | Ø 600 mm stainless steel |
| Deposition Methods | Magnetron sputtering, thermal evaporation, e-beam, plasma CVD |
| Magnetron Sources | Up to 4 × DC/RF targets (2-inch or 3-inch) |
| E-Beam Source | Optional — 3 kW or 6 kW e-beam gun |
| Base Pressure | < 2 × 10⁻⁴ Pa |
| Vacuum System | Turbomolecular pump (500 L/s) + rotary backing pump |
| Substrate Heater | Up to 800 °C |
| Substrate Rotation | Motorised — 0–30 rpm |
| Gas Lines | 4 channels with MFC (Ar, O₂, N₂, reactive gases) |
| Thickness Monitor | 2-channel QCM |
| Source Shutter | Individual pneumatic shutters |
| Supply Voltage | AC 380 V / 50 Hz, 3-phase |
| Total Power | ≈ 15 kW |
| Overall Dimensions | 1200 × 900 × 2000 mm |
| Applications | Oxide films, nitrides, metals, dielectrics, solar cells, MEMS |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |
