The CYSI Three-Target Upper (Upward-Facing) Magnetron Sputtering Coater positions the substrate face-down above three upward-directed magnetron sources, enabling gravity-assisted conformal deposition on curved, irregular, and particle substrates. With independent DC and RF power per target, motorised substrate rotation, and in-situ target shutters, this system is ideal for coating complex-geometry parts, spherical substrates, and powder particles that cannot be coated uniformly in conventional face-up sputtering geometries.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-MSP-3T-Upper |
| Geometry | Upward-facing (substrate face-down over sources) |
| Number of Targets | 3 — independent DC / RF |
| Target Size | 2-inch (Ø 50.8 mm) or 3-inch (Ø 76.2 mm) |
| DC Power Supply | 500 W × 2 |
| RF Power Supply | 300 W × 1 at 13.56 MHz |
| Individual Shutters | Yes — per target |
| Substrate Rotation | Motorised — 0–30 rpm |
| Base Pressure | < 5 × 10⁻⁴ Pa |
| Vacuum Chamber | Stainless Steel Ø 350 mm × 400 mm |
| Vacuum System | Turbomolecular pump + rotary vane pump |
| Gas Lines | 2-channel MFC (Ar + reactive gas) |
| Substrate Heater | Optional — up to 400 °C |
| Supply Voltage | AC 220 V / 50 Hz |
| Applications | Curved parts, powders, complex-geometry substrate coating |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |
