The CYSI Three-Target DC Magnetron Sputtering Coater with integrated in-situ plasma cleaning function combines a 3-target sputtering system with a dedicated RF plasma etch source that cleans substrate surfaces immediately before deposition — all within the same vacuum chamber. This eliminates air exposure between cleaning and coating, delivering superior film adhesion, lower interface defect density, and excellent multilayer film quality for optical, electronic, and wear-resistant coating applications.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-MSP-3T-Clean |
| Number of Targets | 3 × DC magnetron sources |
| Target Size | 2-inch (Ø 50.8 mm) or 3-inch (Ø 76.2 mm) |
| DC Power Supply | 500 W × 3 (independent) |
| In-Situ Plasma Cleaning | RF ion etching source — 13.56 MHz, up to 300 W |
| Cleaning Gas | Ar (MFC controlled) |
| Individual Shutters | Yes — per target + cleaning source |
| Substrate Rotation | Motorised — ≤ 20 rpm |
| Substrate Heater | Optional — up to 400 °C |
| Base Pressure | < 5 × 10⁻⁴ Pa |
| Vacuum Chamber | Stainless Steel Ø 350 mm × 400 mm |
| Vacuum System | Turbomolecular pump + rotary vane pump |
| Gas Lines | 2-channel MFC (Ar + reactive gas) |
| Supply Voltage | AC 220 V / 50 Hz |
| Overall Dimensions | 750 × 600 × 1300 mm |
| Applications | High-adhesion multilayer optical, hard, and electronic coatings |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |
