The CYSI Three-Source Evaporation Coater with Integrated Glove Box is a complete inert-atmosphere thin film deposition platform that combines a 3-source high-vacuum evaporation chamber with a single-station Ar/N₂ glove box. Samples can be loaded, processed, and retrieved entirely within the inert enclosure — eliminating air exposure at every stage. Designed specifically for perovskite solar cells, OPV, and organic semiconductor device fabrication.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-TEV-3Src-GloveBox |
| Number of Sources | 3 × resistance evaporation boats |
| Chamber Material | Stainless Steel — attached to glove box |
| Base Pressure | < 5 × 10⁻⁴ Pa |
| Vacuum System | Turbomolecular pump + rotary vane pump |
| Thickness Monitor | 3-channel QCM — per source |
| Individual Shutters | Yes — per source |
| Glove Box Atmosphere | Ar or N₂ — H₂O < 1 ppm, O₂ < 1 ppm |
| Glove Box Purification | Integrated molecular sieve + catalyst purifier |
| Glove Box Ports | 1 antechamber for sample transfer |
| Substrate Heater | Optional — up to 150 °C |
| Substrate Size | Up to 4 inches |
| Supply Voltage | AC 220 V / 50 Hz |
| Total Power | ≈ 4 kW (evaporator) + 2 kW (glove box) |
| Applications | Perovskite, OPV, OLED, organic TFT device fabrication |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |