The CYSI Single-Target DC Magnetron Sputtering Coater is specifically optimised for reactive sputtering of transparent conductive oxide (TCO) films — ITO, AZO, ZnO — and metal oxide films from metallic targets in Ar/O₂ atmosphere. A turbomolecular high-vacuum system, precise MFC-controlled gas mixing, and a heated rotating substrate stage ensure stoichiometric, low-resistivity oxide films ideal for solar cells, displays, and sensors.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-MSP-1T-Oxide |
| Sputtering Mode | DC reactive magnetron sputtering |
| Target Size | 2-inch (Ø 50.8 mm) or 3-inch (Ø 76.2 mm) |
| Target Materials | In, Zn, Al, Sn (metallic for reactive sputtering) |
| DC Power Supply | 500 W |
| Reactive Gas | O₂ (MFC controlled) + Ar |
| Gas Lines | 2-channel MFC (Ar + O₂) |
| Base Pressure | < 5 × 10⁻⁴ Pa |
| Working Pressure | 0.3–1.5 Pa |
| Vacuum System | Turbomolecular pump + rotary vane pump |
| Substrate Heater | Up to 400 °C — for film crystallinity |
| Substrate Rotation | ≤ 20 rpm |
| Substrate Size | Up to 4 inches |
| Supply Voltage | AC 220 V / 50 Hz |
| Overall Dimensions | 550 × 450 × 750 mm |
| Applications | ITO, AZO, ZnO TCO films; solar cells, displays, sensors |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |
