The CYSI Multi-Source High-Vacuum Evaporation Coater integrates multiple resistance and/or e-beam evaporation sources within a large-volume SS bell-jar chamber, enabling sequential or co-evaporation of 3–6 materials in a single pump-down cycle. Combined with an in-situ quartz crystal thickness monitor and substrate rotation, it delivers precise multilayer optical, OLED, and photovoltaic thin films with angstrom-level thickness accuracy.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-TEV-Multi |
| Chamber Type | SS Bell Jar — large volume |
| Number of Sources | 3–6 (resistance boats + optional e-beam) |
| Source Materials | Al, Ag, Au, Cr, Ni, MgF₂, ZnS, LiF, organics |
| Base Pressure | < 3 × 10⁻⁴ Pa |
| Vacuum System | Diffusion pump + rotary vane backing pump |
| Vacuum Gauges | Pirani + Penning ionisation gauges |
| Thickness Monitor | Multi-channel QCM — Å/s real-time display |
| Substrate Rotation | Motorised — for film uniformity |
| Substrate Heater | Optional — up to 300 °C |
| Individual Source Shutter | Yes — per source |
| Supply Voltage | AC 220 V / 50 Hz |
| Total Power | ≈ 5 kW |
| Overall Dimensions | 700 × 650 × 1200 mm |
| Applications | OLED, optical coatings, photovoltaics, electrode deposition |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |
