The CYSI Coating System with Vacuum Chamber Sample Transfer integrates an automated sample transfer mechanism and a load-lock entry chamber with the main sputtering deposition chamber, enabling continuous substrate loading and unloading without breaking the main chamber vacuum. This dramatically increases throughput, maintains chamber cleanliness, and ensures consistent film quality across production runs — essential for research groups scaling from single samples to batch deposition workflows.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-MSP-LoadLock-Transfer |
| Load Lock Volume | Compact — independent roughing pump |
| Transfer Mechanism | Magnetically coupled linear transfer arm |
| Transfer Time | < 60 s substrate exchange without venting main chamber |
| Main Chamber Pressure | < 5 × 10⁻⁴ Pa base pressure maintained |
| Magnetron Targets | Up to 3 (DC/RF — configurable) |
| Target Size | 2-inch or 3-inch |
| Substrate Heater | Optional — up to 600 °C |
| Substrate Rotation | Motorised — ≤ 20 rpm |
| Gas Lines | 2-channel MFC (Ar + reactive gas) |
| Vacuum System (Main) | Turbomolecular pump + rotary backing pump |
| Vacuum System (LL) | Dedicated rotary pump + gate valve |
| Supply Voltage | AC 380 V / 50 Hz, 3-phase |
| Control System | PLC + touch-screen — full automation |
| Applications | High-throughput PVD, batch coating, research production scale-up |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |
