The CYSI Electron Beam Evaporation Coating System uses a focused high-energy electron beam to evaporate high-melting-point metals (W, Mo, Ta, Pt), refractory dielectrics (SiO₂, Al₂O₃, HfO₂, TiO₂), and semiconductor materials that cannot be processed by conventional resistance evaporation. The multi-pocket rotating crucible, in-situ QCM thickness monitor, and substrate rotation ensure precise, reproducible multilayer optical coatings and semiconductor contact metallisation with angstrom-level thickness control.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-Ebeam-Evap-Semi |
| Evaporation Method | Electron beam (e-beam) — swept beam focus |
| E-Beam Power | 3 kW or 6 kW (selectable model) |
| E-Beam Sweep | Programmable X-Y magnetic deflection |
| Crucible Type | 4-pocket or 6-pocket rotating water-cooled Cu hearth |
| Target Materials | W, Mo, Ta, Pt, Ni, SiO₂, Al₂O₃, HfO₂, TiO₂, and more |
| Base Pressure | < 1 × 10⁻⁴ Pa |
| Vacuum System | Turbomolecular pump + cryopump (optional) + rotary |
| Thickness Monitor | Multi-channel QCM — Å/s real-time display |
| Substrate Rotation | Motorised — for film uniformity |
| Substrate Heater | Optional — up to 400 °C |
| Individual Shutters | Yes — per pocket + master shutter |
| Supply Voltage | AC 380 V / 50 Hz, 3-phase |
| Total Power | ≈ 10 kW |
| Applications | Optical multilayer, HV contacts, MEMS, semiconductor metallisation |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |
