High-purity Yttrium Oxide (Y₂O₃) sputtering targets for RF magnetron deposition of high-k dielectric gate oxides, YSZ electrolyte buffer layers, YAG:Ce phosphor precursor films, and rare-earth doped optical coatings. Y₂O₃ has a high dielectric constant (k ~15–18), wide bandgap (~6 eV), and excellent chemical stability up to 2400°C. CY Scientific Y₂O₃ targets are sintered to > 95% density for consistent RF sputtering performance.
Specifications
| Parameter | Value / Details |
|---|
| Material | Yttrium Oxide (Y₂O₃) |
| Purity | 99.9% (3N) / 99.99% (4N) |
| Bandgap | ~6 eV |
| Dielectric Constant | k ≈ 15–18 |
| Melting Point | 2425 °C |
| Relative Density | > 95% theoretical density |
| Crystal Structure | Cubic — bixbyite |
| Standard Sizes | Ø 50.8 mm × 3 mm / Ø 76.2 mm × 3 mm |
| Sputtering Method | RF magnetron sputtering |
| Process Gas | Ar / Ar + O₂ |
| Film Applications | High-k gate, YSZ buffer, optical coating, EL phosphor host |
| Packaging | Vacuum-sealed bag + foam box |
| Certification | ICP-OES purity certificate |
| Storage | Cool, dry — hygroscopic — reseal after use |
| Customization | Size, purity, RE doping (Eu, Tb, Ce), bonding on request |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Piece |
| Supply Ability | 100 Pieces Per Month |
| Delivery Time | 1–3 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Sealed vacuum bag + foam-padded box |
| Certification | ISO 9001 — quality management certified |
| Storage | Cool, dry environment — avoid humidity |
| Customization | Custom size, purity, bonding, and shape available |
