High-purity Zirconium (Zr) metal sputtering targets for DC reactive magnetron sputtering of zirconium oxide (ZrO₂), zirconium nitride (ZrN), and pure Zr thin films. CY Scientific Zr targets are produced by electron-beam melting and cold rolling to achieve a fine-grained, uniform microstructure with minimal inclusions — ensuring stable arc-free sputtering, high deposition rates, and excellent run-to-run film reproducibility for semiconductor, optical, and hard coating applications.
Specifications
| Parameter | Value / Details |
|---|
| Material | Zirconium (Zr) — pure metal |
| Purity | 99.5% (2N5) / 99.9% (3N) / 99.95% (3N5) |
| Microstructure | Fine grain — EB melted + cold rolled |
| Standard Sizes | Ø 50.8 mm × 3–6 mm / Ø 76.2 mm × 3–6 mm |
| Custom Sizes | Rectangular and custom shapes available |
| Bonding | Cu or Mo backing plate bonding available |
| Sputtering Mode | DC magnetron (metal films) / reactive DC (ZrO₂, ZrN) |
| Reactive Gas | O₂ for ZrO₂ / N₂ for ZrN |
| Film Applications | ZrO₂ dielectric, ZrN hard coating, Zr diffusion barrier |
| Packaging | Vacuum-sealed bag + foam box |
| Certification | ICP-OES purity certificate |
| Lead Time | 3–7 business days (stock) / 10–20 days (custom) |
| Storage | Cool, dry — avoid oxidation exposure |
| Hazard Note | Zr is flammable as fine powder — handle machined targets safely |
| Customization | Purity, dimensions, bonding, and quantity on request |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Piece |
| Supply Ability | 100 Pieces Per Month |
| Delivery Time | 1–3 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Sealed vacuum bag + foam-padded box |
| Certification | ISO 9001 — quality management certified |
| Storage | Cool, dry environment — avoid humidity |
| Customization | Custom size, purity, bonding, and shape available |
