The CYSI Gas Mass Flow Controllers (MFCs) and Gauge Pressure Controllers provide accurate, repeatable gas flow measurement and control for CVD, PECVD, furnace atmosphere, and reactive sputtering processes. Thermal mass flow sensing technology delivers flow accuracy of ±1% full scale across a wide range of process gases including Ar, N₂, H₂, O₂, CH₄, SiH₄, and NH₃. Available in single-channel units or pre-configured multi-channel gas mixing panels.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-MFC-Series |
| Flow Measurement | Thermal mass flow — capillary bypass |
| Flow Accuracy | ± 1% full scale (FS) |
| Repeatability | ± 0.2% FS |
| Response Time | < 1 s to 98% setpoint |
| Flow Range | 0–20 sccm to 0–50 slm (various models) |
| Compatible Gases | Ar, N₂, H₂, O₂, CH₄, CO₂, SiH₄, NH₃, SF₆, and others |
| Control Signal | 0–5 V or 4–20 mA (selectable) |
| Communication | RS-232 / RS-485 / Modbus (optional) |
| Pressure Range | 0–0.1 MPa / 0–1 MPa (gauge pressure models) |
| Valve Type | Normally closed solenoid — fast response |
| Body Material | 316L stainless steel — corrosion resistant |
| Supply Voltage | DC 15 V / 24 V |
| Connector | D-sub 9-pin (standard) |
| Applications | CVD, PECVD, sputtering gas mixing, furnace atmosphere control |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Piece |
| Supply Ability | 100 Pieces Per Month |
| Delivery Time | 1–3 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Sealed vacuum bag + foam-padded box |
| Certification | ISO 9001 — quality management certified |
| Storage | Cool, dry environment — avoid humidity |
| Customization | Custom size, purity, bonding, and shape available |
