The CYSI Four-Target Magnetron Sputtering Coater delivers multi-layer and alloy thin film deposition using up to 4 independent DC or RF magnetron sources. With motorised substrate rotation, an independent shutter per target, and programmable power sequencing, it produces complex multilayer stacks, graded compositions, and co-sputtered alloy films with exceptional inter-layer adhesion and film uniformity across the substrate.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-MSP-4T |
| Number of Targets | 4 (independent DC and/or RF) |
| Target Size | 2-inch (Ø 50.8 mm) or 3-inch (Ø 76.2 mm) |
| DC Power Supply | 500 W × 2 (or 1000 W, configurable) |
| RF Power Supply | 300 W × 2 at 13.56 MHz (optional) |
| Auto Matching Network | Yes — per RF source |
| Individual Target Shutter | Yes — per target, pneumatically controlled |
| Substrate Rotation | Motorised — ≤ 20 rpm for uniformity |
| Substrate Heater | Optional — up to 600 °C |
| Base Pressure | < 5 × 10⁻⁴ Pa |
| Vacuum Chamber | Stainless Steel Ø 300 mm × 350 mm |
| Vacuum System | Turbomolecular pump + rotary vane pump |
| Gas Lines | 2 channels MFC (Ar + reactive gas) |
| Supply Voltage | AC 220–380 V / 50 Hz |
| Overall Dimensions | 800 × 600 × 1400 mm |
| Applications | Multilayer optical coatings, electrode films, hard coatings, research PVD |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |
