The CYSI DC Three-Target High-Vacuum Magnetron Sputtering Coater is designed for deposition of PTFE-composite, DLC, MoS₂, and other low-friction anti-wear thin films using a 3-target configuration with a large stainless steel vacuum chamber. Independent power control per target, motorised substrate rotation, and in-situ plasma cleaning capability enable complex multilayer tribological coatings for tool, bearing, and precision machinery applications.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-MSP-3T-PTFE |
| Number of Targets | 3 × DC magnetron sources |
| Target Size | 3-inch (Ø 76.2 mm) |
| DC Power Supply | 500 W × 3 (independent) |
| Plasma Cleaning | In-situ ion etching capability |
| Substrate Rotation | Motorised — ≤ 20 rpm |
| Substrate Heater | Optional — up to 300 °C |
| Base Pressure | < 5 × 10⁻⁴ Pa |
| Vacuum Chamber | Stainless Steel Ø 400 mm × 450 mm |
| Vacuum System | Turbomolecular pump + rotary vane pump |
| Gas Lines | 2-channel MFC (Ar + reactive gas) |
| Individual Shutters | Yes — per target |
| Supply Voltage | AC 220 V / 50 Hz |
| Overall Dimensions | 750 × 600 × 1300 mm |
| Applications | PTFE, DLC, MoS₂, TiN, CrN anti-friction wear coatings |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |
