The CYSI 5-inch Short-Distance Evaporation Coating System features an ultra-compact stainless steel vacuum chamber optimised for close-proximity substrate-to-source geometry, significantly improving deposition efficiency and material utilisation. Designed for OLED electrode deposition, perovskite solar cell metal contacts, and general research PVD, it accommodates substrates up to 5 inches with a base pressure of 5 × 10⁻⁴ Pa.
Specifications
| Parameter | Value / Details |
|---|
| Product Model | CY-TEV-5IN-SS-Short |
| Chamber Material | 304 Stainless Steel |
| Substrate Size | Up to 5 inches (127 mm) |
| Source-to-Substrate Dist. | Adjustable short-distance geometry |
| Evaporation Sources | Up to 3 resistance boats (simultaneous) |
| Source Materials | Al, Ag, Au, Mg, Ca, LiF, organic materials |
| Base Pressure | 5 × 10⁻⁴ Pa |
| Vacuum System | Turbomolecular pump + rotary vane pump |
| Vacuum Gauges | Pirani + Penning ionisation gauges |
| Substrate Heater | Optional — up to 200 °C |
| Thickness Monitor | Quartz crystal microbalance (QCM) |
| Supply Voltage | AC 220 V / 50 Hz |
| Total Power | ≈ 2 kW |
| Overall Dimensions | 500 × 500 × 700 mm |
| Applications | OLED electrodes, perovskite cells, optical coatings, research PVD |
Trade Information
| Trade Detail | Information |
|---|
| Minimum Order Quantity | 1 Unit |
| Supply Ability | 4 Units Per Month |
| Delivery Time | 3–8 Weeks |
| Main Domestic Market | China |
| Export Markets | Worldwide |
| Payment Terms | T/T, L/C, Western Union, PayPal |
| Packaging | Wooden crate with foam-padded export packing |
| Warranty | 12 Months from date of commissioning |
| After-Sales Service | Online technical support + on-site service available |
| Customization | Available on request |
